AIO International Corp.
6050 Hellyer Ave, Suite 150
San Jose, CA 95138 U.S.A
PRODUCT<<DUNA
Spin Coater Specifications
- Substrate: Up to 150mm
- Programmable Speed: Up to 5,000 rpm
- Speed Increment: 10 rpm
- Speed Display: Digital (LCD)
- Spin Steps: 10
- Process Recipe: 10 Recipes
- Time: 1-999 sec
- Vacuum: -80 kPa
- Vacuum Connection: 4mm ID/6mmOD
- Weight: 16kg
- Power: 100-230 VAC
- Dimensions (W x H x D): 535 x 182 x 385mm (for 150mm)

Hot Plate Specifications
- Substrate: Up to 150mm
- Programmable Temperature: 50-200oC
- Temperature Control: ?.1oC

Options
- Automatic Dispense
- High Temperatrue Bake

  MODELS:

  D¨šNA 100CB
Specifications
- Wafer size: up to 300mm
- Spin speed range: - 6000 rpm
- Brushless spin motor
- Recipe: 10 recipes, 10 steps/recipe

Option: Pump dispense

  MODELS:

  D¨šNA 100C

Specifications
- Wafer size: up to 200mm
- Programmable Temperature: 50-200oC
- Temperature control: ?.1oC


Options
- Pin lifter
- High Temperature Option up to 400oC
- Digital timer
- 3 proximity pins 0.006" high

  MODELS:

  D¨šNA 100B
Automated Spin Coat System
- Spin coater + Wafer transfer robot + Indexer

Specifications:
- Wafer size: 150mm or 200mm
- Color LCD monitor
- User friendly programmability
- Spin speed range: -6000 rpm
- Back side rinse
- Catch-cup exhaust
- Dimensions: 16"W x 14"D x 23"H
- Weight: 60lb

Available Options:
- Automatic pump dispense w/ moving dispense arm
Multiple chemical lines
- 3 max. w/ temperature control
- 6 max. w/o temperature control
- Edge bead removal (Top EBR)
- Wafer centering mechanism
- Programmable catch-cup cover rinse
- Programmable catch-cup splash ring
- Programmable catch-cup exhaust

  MODELS:

  D¨šNA 200C
Specifications
- Wafer size: 200mm
-Spin speed range: - 6000 rpm
-Multiple chemical lines (3 max.)
-Motorized dispense arm (optional)
-Pump dispense
-Single arm wafer transfer robot
-System footprint: 23" x 43"

Design specification

1. Coater
-Spin speed: 0 - 6000 rpm
-Dispense lines: 3 Max.
-TEBR
-BEBR
-Solvent bath
-Wafer centering mechanism

2. Robot
-Single arm with a vacuum paddle
-X stroke: +/- 14"
-Z stroke: 8"

3. System control
- Lot operation
- Unlimited Recipe and Recipe editor
- Service mode including calibration
- Alarm, event monitoring & history
- Touch screen GUI

  MODELS:

  D¨šNA 201C
   
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AIO INTERNATIONAL. TEL:1.(408).586.7667.(USA).sales@aiointernational.com