|
 |
|
|
|
Puffin 50 Mini Pump
The Smallest and Lowest Cost of ownership |
|
|
APPLICATON:
- Photoresist
- Polyimide
- SOG
- CMP Slurry
- Disk Cleaning & Polishing
- Positive/Negative Developer
- EBR (Edge Bead Removal)
- Catch Cup Bowl Wash
|
 |
|
|
|
FEATURES:
- Microprocessor and ADC (Analog Digital Converter)
- User friendly LCD display
- Easy parameter setup using wireless IR Remote control
- All parameters are programmable (in nonvolatile memory)
- 20ms (1/50Sec) timer resolution for driving pneumatic valves
- Digitized display for dispense parameters setting
- 16-stack cartridge filter (FP50F type)
- Adjustable vent rate
OPTION:
- PF50S /External suckback valve assembly
|
|
|
|
|
|
|
|
|
|
 |
|
¡¡ |
|
|
PUFFIN PF50(F) SPECIFICATIONS |
|
|
|
| Item |
Description |
| Dispense Volume |
0.1-25 ml |
| Viscosity Range |
1-100cp (Filter type), 1-1000cp (Non-filter type) |
| Dispense/Suction Flow Rate |
0.1-20 ml/sec *1 |
| Dispense Volume Repeatability |
¡À0.01 ml *2 |
| Dispense method |
Pressurized Buffer Tank Pump |
| Filter (Option) |
217-111X, Microgard Minichem 16 Cartridge Filter |
| Non-filter Pump (PF50) size |
100mmLx100mmWx43mmH |
| Filter Pump (PF50F) size |
100mmLx100mmWx95mmH |
| Controller size |
85mmWx90mmDx46mmH |
| Power |
DC 24V, 1A |
| N2 Inlet Gas Pressure |
50psi |
| Vacuum |
22~25 inHg +/- 1inHg |
*1. Depends on dispense rate, fluid viscosity, and tubing ID.
*2. Depends on dispense rate and fluid viscosity |
|
¡¡ |
|
|
|
 |
|
¡¡ |
|
|